Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6572445 | Multizone slurry delivery for chemical mechanical polishing tool | — | 2003-06-03 |
| 6555466 | Two-step chemical-mechanical planarization for damascene structures on semiconductor wafers | Malcolm Grief, Krishna P. Murella, Sanjay Basak | 2003-04-29 |
| 6521537 | Modification to fill layers for inlaying semiconductor patterns | — | 2003-02-18 |