Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646224 | Plasma-assisted processing system and plasma-assisted processing method | Nobuo Ishii, Makoto Ando, Naohisa Goto | 2003-11-11 |
| 6622650 | Plasma processing apparatus | Nobuo Ishii | 2003-09-23 |
| 6527909 | Plasma processing apparatus | Nobuo Ishii | 2003-03-04 |
| 6528752 | Plasma processing apparatus and plasma processing method | Nobuo Ishii, Makoto Ando, Naohisa Goto | 2003-03-04 |