Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670741 | Plasma processing apparatus with annular waveguide | — | 2003-12-30 |
| 6657151 | Plasma processing device | Kibatsu Shinohara | 2003-12-02 |
| 6646224 | Plasma-assisted processing system and plasma-assisted processing method | Yasuyoshi Yasaka, Makoto Ando, Naohisa Goto | 2003-11-11 |
| 6622650 | Plasma processing apparatus | Yasuyoshi Yasaka | 2003-09-23 |
| 6527909 | Plasma processing apparatus | Yasuyoshi Yasaka | 2003-03-04 |
| 6528752 | Plasma processing apparatus and plasma processing method | Yasuyoshi Yasaka, Makoto Ando, Naohisa Goto | 2003-03-04 |