Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646224 | Plasma-assisted processing system and plasma-assisted processing method | Nobuo Ishii, Yasuyoshi Yasaka, Makoto Ando | 2003-11-11 |
| 6528752 | Plasma processing apparatus and plasma processing method | Nobuo Ishii, Yasuyoshi Yasaka, Makoto Ando | 2003-03-04 |
| 6522301 | Above deck unit for automatic identification system | Masaki Takayama, Naoki Yokoyama, Masanori Haga | 2003-02-18 |