Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664028 | Method of forming opening in wafer layer | Jiunn-Ren Hwang | 2003-12-16 |
| 6656667 | Multiple resist layer photolithographic process | Jiunn-Ren Hwang | 2003-12-02 |
| 6589881 | Method of forming dual damascene structure | Jiunn-Ren Hwang, Kuei-Chun Hung, Ching-Hsu Chang | 2003-07-08 |
| 6582858 | Alternating phase shifting mask | Chien-Wen Lai, Chien-Ming Wang, Feng-Yuan Chang | 2003-06-24 |
| 6579790 | Dual damascene manufacturing process | Jiunn-Ren Hwang | 2003-06-17 |
| 6541782 | Electron beam photolithographic process | Jiunn-Ren Hwang | 2003-04-01 |