Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617081 | Method for improving process window in semi-dense area by using phase shifter | Chih-Yung Lin | 2003-09-09 |
| 6596448 | Phase error monitor pattern and application | Chemg-Shyan Tsay | 2003-07-22 |
| 6582858 | Alternating phase shifting mask | Chien-Ming Wang, Feng-Yuan Chang, I-Hsiung Huang | 2003-06-24 |