Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6647642 | Liquid processing apparatus and method | Taichi Sakaguchi | 2003-11-18 |
| 6613692 | Substrate processing method and apparatus | Takayuki Toshima, Kinya Ueno, Miyako Yamasaka, Hideyuki Tsutsumi, Tadashi Iino | 2003-09-02 |
| 6592678 | Cleaning method and cleaning equipment | Naoki Shindo, Shigenori Kitahara, Miyako Yamasaka | 2003-07-15 |
| 6589359 | Cleaning method and cleaning apparatus for substrate | Hiroshi Tanaka | 2003-07-08 |
| 6578592 | Processing apparatus with horizontally movable enclosing element | Takehiko Orii, Kyouji Kohama | 2003-06-17 |
| 6575178 | Cleaning and drying method and apparatus | — | 2003-06-10 |
| 6536452 | Processing apparatus and processing method | Kyouji Kohama, Eiji Shimbo, Takayuki Toshima, Hiroki Ohno | 2003-03-25 |
| 6532975 | Substrate processing apparatus and substrate processing method | Kouji Egashira, Koji Tanaka | 2003-03-18 |
| 6510859 | Apparatus and method for cleaning and drying object | — | 2003-01-28 |