SK

Shigenori Kitahara

TL Tokyo Electron Limited: 1 patents #101 of 380Top 30%
Overall (2003): #120,317 of 273,478Top 45%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6592678 Cleaning method and cleaning equipment Yuji Kamikawa, Naoki Shindo, Miyako Yamasaka 2003-07-15