Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613692 | Substrate processing method and apparatus | Takayuki Toshima, Miyako Yamasaka, Hideyuki Tsutsumi, Tadashi Iino, Yuji Kamikawa | 2003-09-02 |
| 6554010 | Substrate cleaning tool, having permeable cleaning head | Keizo Hirose, Kenji Sekiguchi, Tomohide Inoue, Takanori Miyazaki | 2003-04-29 |