Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6554010 | Substrate cleaning tool, having permeable cleaning head | Kenji Sekiguchi, Tomohide Inoue, Takanori Miyazaki, Kinya Ueno | 2003-04-29 |
| 6544380 | Plasma treatment method and apparatus | Masayuki Tomoyasu, Akira Koshiishi, Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara +6 more | 2003-04-08 |