Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576860 | Plasma processing method and apparatus for eliminating damages in a plasma process of a substrate | Chishio Koshimizu, Jun Ooyabu, Hideki Takeuchi | 2003-06-10 |
| 6544380 | Plasma treatment method and apparatus | Masayuki Tomoyasu, Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara, Yukio Naito +6 more | 2003-04-08 |