Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576860 | Plasma processing method and apparatus for eliminating damages in a plasma process of a substrate | Chishio Koshimizu, Jun Ooyabu, Akira Koshiishi | 2003-06-10 |
| 6520718 | Sardine-bone construction method for large-section tunnel | Shigeki Nagatomo, Hideo Fujimoto, Shigehito Kaji, Yoshio Mitarashi, Sohki Ohtsu +4 more | 2003-02-18 |