Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576860 | Plasma processing method and apparatus for eliminating damages in a plasma process of a substrate | Chishio Koshimizu, Hideki Takeuchi, Akira Koshiishi | 2003-06-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576860 | Plasma processing method and apparatus for eliminating damages in a plasma process of a substrate | Chishio Koshimizu, Hideki Takeuchi, Akira Koshiishi | 2003-06-10 |