Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652920 | Method for meniscuscoating a substrate with a polymeric precursor | Ruben G. Carbonell, Brian J. Novick | 2003-11-25 |
| 6641678 | Methods for cleaning microelectronic structures with aqueous carbon dioxide systems | James DeYoung, James B. McClain, Stephen M. Gross | 2003-11-04 |
| 6623355 | Methods, apparatus and slurries for chemical mechanical planarization | James B. McClain | 2003-09-23 |
| 6517633 | Apparatus for meniscus coating with liquid carbon dioxide | Ruben G. Carbonell, Brian J. Novick | 2003-02-11 |
| 6512062 | Polymerization of non-fluorinated monomers in carbon dioxide | Terri J. Carson, Hiroshi Shiho, Jeremy Richard Lizotte | 2003-01-28 |