Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669785 | Methods and compositions for etch cleaning microelectronic substrates in carbon dioxide | Stephen M. Gross, Mark I. Wagner, James B. McClain | 2003-12-30 |
| 6641678 | Methods for cleaning microelectronic structures with aqueous carbon dioxide systems | James B. McClain, Stephen M. Gross, Joseph M. DeSimone | 2003-11-04 |
| 6613157 | Methods for removing particles from microelectronic structures | James B. McClain, Stephen M. Gross | 2003-09-02 |
| 6602351 | Methods for the control of contaminants following carbon dioxide cleaning of microelectronic structures | James B. McClain, Stephen M. Gross | 2003-08-05 |
| 6596093 | Methods for cleaning microelectronic structures with cyclical phase modulation | James B. McClain, Michael E. Cole, David Brainard | 2003-07-22 |
| 6562146 | Processes for cleaning and drying microelectronic structures using liquid or supercritical carbon dioxide | James B. McClain, Stephen M. Gross | 2003-05-13 |