Issued Patents 2003
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6669785 | Methods and compositions for etch cleaning microelectronic substrates in carbon dioxide | James DeYoung, Stephen M. Gross, Mark I. Wagner | 2003-12-30 |
| 6666050 | Apparatus for conserving vapor in a carbon dioxide dry cleaning system | David Brainard, Michael E. Cole, Steve Worm | 2003-12-23 |
| 6641678 | Methods for cleaning microelectronic structures with aqueous carbon dioxide systems | James DeYoung, Stephen M. Gross, Joseph M. DeSimone | 2003-11-04 |
| 6623355 | Methods, apparatus and slurries for chemical mechanical planarization | Joseph M. DeSimone | 2003-09-23 |
| 6613157 | Methods for removing particles from microelectronic structures | James DeYoung, Stephen M. Gross | 2003-09-02 |
| 6602351 | Methods for the control of contaminants following carbon dioxide cleaning of microelectronic structures | James DeYoung, Stephen M. Gross | 2003-08-05 |
| 6596093 | Methods for cleaning microelectronic structures with cyclical phase modulation | James DeYoung, Michael E. Cole, David Brainard | 2003-07-22 |
| 6589592 | Methods of coating articles using a densified coating system | Steve Worm | 2003-07-08 |
| 6562146 | Processes for cleaning and drying microelectronic structures using liquid or supercritical carbon dioxide | James DeYoung, Stephen M. Gross | 2003-05-13 |
| 6536059 | Pumpless carbon dioxide dry cleaning system | Michael E. Cole | 2003-03-25 |
| 6506259 | Carbon dioxide cleaning and separation systems | Timothy J. Romack, Gina M. Stewart, Ramone D. Givens | 2003-01-14 |