Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632747 | Method of ammonia annealing of ultra-thin silicon dioxide layers for uniform nitrogen profile | Hiroaki Niimi, Douglas T. Grider, Rajesh Khamankar | 2003-10-14 |
| 6610614 | Method for uniform nitridization of ultra-thin silicon dioxide layers in transistor gates | Hiroaki Niimi, Rajesh Khamankar | 2003-08-26 |