Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632747 | Method of ammonia annealing of ultra-thin silicon dioxide layers for uniform nitrogen profile | Douglas T. Grider, Rajesh Khamankar, Sunil Hattangady | 2003-10-14 |
| 6610614 | Method for uniform nitridization of ultra-thin silicon dioxide layers in transistor gates | Sunil Hattangady, Rajesh Khamankar | 2003-08-26 |
| 6548366 | Method of two-step annealing of ultra-thin silicon dioxide layers for uniform nitrogen profile | Douglas T. Grider, Rajesh Khamankar | 2003-04-15 |
| 6503846 | Temperature spike for uniform nitridization of ultra-thin silicon dioxide layers in transistor gates | James Joseph Chambers, Rajesh Khamankar, Douglas T. Grider | 2003-01-07 |