Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645840 | Multi-layered polysilicon process | Che-Jen Hu | 2003-11-11 |
| 6632718 | Disposable spacer technology for reduced cost CMOS processing | Terence Breedijk | 2003-10-14 |
| 6632747 | Method of ammonia annealing of ultra-thin silicon dioxide layers for uniform nitrogen profile | Hiroaki Niimi, Rajesh Khamankar, Sunil Hattangady | 2003-10-14 |
| 6548366 | Method of two-step annealing of ultra-thin silicon dioxide layers for uniform nitrogen profile | Hiroaki Niimi, Rajesh Khamankar | 2003-04-15 |
| 6503846 | Temperature spike for uniform nitridization of ultra-thin silicon dioxide layers in transistor gates | Hiroaki Niimi, James Joseph Chambers, Rajesh Khamankar | 2003-01-07 |