Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6631299 | System and method for self-tuning feedback control of a system | Steven T. Jenkins, Clifton E. Brooks, Stephanie L. Hilbun | 2003-10-07 |
| 6623333 | System and method for controlling a wafer polishing process | Gregory A. Miller, Christopher D. Guinn, Adriana Sanchez | 2003-09-23 |
| 6589800 | Method of estimation of wafer-to-wafer thickness | Gregory A. Miller, Steven T. Jenkins | 2003-07-08 |
| 6584369 | Method and system for dispatching semiconductor lots to manufacturing equipment for fabrication | Steven T. Jenkins | 2003-06-24 |