Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6631299 | System and method for self-tuning feedback control of a system | Nital S. Patel, Clifton E. Brooks, Stephanie L. Hilbun | 2003-10-07 |
| 6589800 | Method of estimation of wafer-to-wafer thickness | Nital S. Patel, Gregory A. Miller | 2003-07-08 |
| 6584369 | Method and system for dispatching semiconductor lots to manufacturing equipment for fabrication | Nital S. Patel | 2003-06-24 |