Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623333 | System and method for controlling a wafer polishing process | Nital S. Patel, Christopher D. Guinn, Adriana Sanchez | 2003-09-23 |
| 6589800 | Method of estimation of wafer-to-wafer thickness | Nital S. Patel, Steven T. Jenkins | 2003-07-08 |