Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649489 | Poly etching solution to improve silicon trench for low STI profile | Li-Wen Chang, Hung-Cheng Sung, Der-Shin Shyu, Han-Ping Chen, Chen-Ming Huang | 2003-11-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649489 | Poly etching solution to improve silicon trench for low STI profile | Li-Wen Chang, Hung-Cheng Sung, Der-Shin Shyu, Han-Ping Chen, Chen-Ming Huang | 2003-11-18 |