Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649489 | Poly etching solution to improve silicon trench for low STI profile | Li-Wen Chang, Hung-Cheng Sung, Der-Shin Shyu, Han-Ping Chen, Ya-Chen Kao | 2003-11-18 |
| 6638409 | Stable plating performance in copper electrochemical plating | Li-Chuen Cheng, Hung-Jen Lin, Chih-Chen Ku, San-Sun Yang | 2003-10-28 |