Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649489 | Poly etching solution to improve silicon trench for low STI profile | Li-Wen Chang, Hung-Cheng Sung, Han-Ping Chen, Chen-Ming Huang, Ya-Chen Kao | 2003-11-18 |
| 6569736 | Method for fabricating square polysilicon spacers for a split gate flash memory device by multi-step polysilicon etch | Cheng-Yuan Hsu, Hung-Cheng Sung, Su-Chang Chen, Han-Ping Chen, Chia-Ta Hsieh | 2003-05-27 |