Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6634930 | Method and apparatus for preventing metal corrosion during chemical mechanical polishing | Ying-Ho Chen, Tsu Shih, Syun-Ming Jang, Chia-Ming Yang | 2003-10-21 |
| 6635211 | Reinforced polishing pad for linear chemical mechanical polishing and method for forming | Ying-Ho Chen, Tsu Shih, Syun-Ming Jang | 2003-10-21 |
| 6544891 | Method to eliminate post-CMP copper flake defect | Ying-Ho Chen, Tsu Shih, Syun-Ming Jang | 2003-04-08 |
| 6515366 | Reduction of metal corrosion in semiconductor devices | Tsu Shih | 2003-02-04 |