Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653203 | Thin sidewall multi-step HDP deposition method to achieve completely filled high aspect ratio trenches | Yeur-Luen Tu, Chung-Yi Yu | 2003-11-25 |
TH
Tsung-Hsun Huang
Overall (2003): #98,707 of 273,478Top 40%
1
Patents 2003