Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653203 | Thin sidewall multi-step HDP deposition method to achieve completely filled high aspect ratio trenches | Tsung-Hsun Huang, Yeur-Luen Tu | 2003-11-25 |
CY
Chung-Yi Yu
Overall (2003): #246,588 of 273,478Top 95%
1
Patents 2003