Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660577 | Method for fabricating metal gates in deep sub-micron devices | Ming-Hsing Tsai | 2003-12-09 |
| 6573187 | Method of forming dual damascene structure | Ming-Hsing Tsai | 2003-06-03 |
| 6560862 | Modified pad for copper/low-k | Shun-Long Chen, Hungtse Lin | 2003-05-13 |
| 6518166 | Liquid phase deposition of a silicon oxide layer for use as a liner on the surface of a dual damascene opening in a low dielectric constant layer | Shun-Long Chen, Hungtse Lin, Frank Hsu, Tsu Shih | 2003-02-11 |