Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6560862 | Modified pad for copper/low-k | Sheng-Hsiung Chen, Shun-Long Chen | 2003-05-13 |
| 6518166 | Liquid phase deposition of a silicon oxide layer for use as a liner on the surface of a dual damascene opening in a low dielectric constant layer | Sheng-Hsiung Chen, Shun-Long Chen, Frank Hsu, Tsu Shih | 2003-02-11 |