Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649535 | Method for ultra-thin gate oxide growth | Shih-Chang Chen | 2003-11-18 |
| 6624090 | Method of forming plasma nitrided gate dielectric layers | Chien-Hao Chen, Shih-Chang Chen | 2003-09-23 |
| 6573193 | Ozone-enhanced oxidation for high-k dielectric semiconductor devices | Yeou-Ming Lin | 2003-06-03 |
| 6566205 | Method to neutralize fixed charges in high K dielectric | Chien-Hao Chen | 2003-05-20 |
| 6511887 | Method for making FET gate oxides with different thicknesses using a thin silicon nitride layer and a single oxidation step | Syun-Ming Jang | 2003-01-28 |