Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660125 | Sputter PM procedures with polish tool to effectively remove metal defects from target surface nodules (residue) | Chung-En Kao, Kuang-Hsing Liu, Ta-Bin Chen | 2003-12-09 |
| 6566263 | Method of forming an HDP CVD oxide layer over a metal line structure for high aspect ratio design rule | Mong-Chi Hung, Teh-Wei Ger | 2003-05-20 |
| 6541370 | Composite microelectronic dielectric layer with inhibited crack susceptibility | Shi-Wei Wang, Shin-Kai Chen | 2003-04-01 |
| 6537919 | Process to remove micro-scratches | — | 2003-03-25 |