Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660125 | Sputter PM procedures with polish tool to effectively remove metal defects from target surface nodules (residue) | Ming-Tsong Wang, Kuang-Hsing Liu, Ta-Bin Chen | 2003-12-09 |
| 6652716 | Apparatus and method for self-aligning a cover ring in a sputter chamber | Min-Te Lai | 2003-11-25 |