Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652716 | Apparatus and method for self-aligning a cover ring in a sputter chamber | Chung-En Kao | 2003-11-25 |
ML
Min-Te Lai
Overall (2003): #156,453 of 273,478Top 60%
1
Patents 2003