Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664011 | Hole printing by packing and unpacking using alternating phase-shifting masks | Burn Jeng Lin, Shinn-Sheng Yu | 2003-12-16 |
| 6538086 | Polymer with a pericyclic protective group and resist composition containing the same | Sheng-Yueh Chang, Jui-Fa Chang, Jian-Hong Chen, Ming-Chia Tai | 2003-03-25 |