Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573024 | Ammonium salt of organic acid and resist composition containing the same | Sheng-Yueh Chang, Ting-Chun Liu, Tzu-Yu Lin, Wen-Yuang Tsai | 2003-06-03 |
| 6538086 | Polymer with a pericyclic protective group and resist composition containing the same | Sheng-Yueh Chang, Bang-Chein Ho, Jui-Fa Chang, Ming-Chia Tai | 2003-03-25 |