Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664011 | Hole printing by packing and unpacking using alternating phase-shifting masks | Shinn-Sheng Yu, Bang-Chein Ho | 2003-12-16 |
| 6627358 | Mask repair in resist image | — | 2003-09-30 |