Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6519075 | Packaged MEMS device and method for making the same | Dennis S. Greywall, Sungho Jin, Flavio Pardo, Hyongsok Soh | 2003-02-11 |
| 6515751 | Mechanically resonant nanostructures | Harold G. Craighead, Lidija Sekaric | 2003-02-04 |