Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667823 | Monolithic in-plane shutter switch | — | 2003-12-23 |
| 6545796 | Article comprising a freestanding micro-tube and method therefor | — | 2003-04-08 |
| 6519075 | Packaged MEMS device and method for making the same | Dustin Wade Carr, Sungho Jin, Flavio Pardo, Hyongsok Soh | 2003-02-11 |