Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6600851 | Electrostatically actuated micro-electro-mechanical system (MEMS) device | Vladimir Anatolyevich Aksyuk, Cristian A. Bolle | 2003-07-29 |
| 6522801 | Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor | Vladimir Anatolyevich Aksyuk, Sungho Jin, Jungsang Kim, Hareesh Mavoori, Ainissa Ramirez | 2003-02-18 |
| 6519075 | Packaged MEMS device and method for making the same | Dustin Wade Carr, Dennis S. Greywall, Sungho Jin, Hyongsok Soh | 2003-02-11 |