Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639312 | Dummy wafers and methods for making the same | James M. Cleeves | 2003-10-28 |
| 6635556 | Method of preventing autodoping | James M. Cleeves, Johan Knall | 2003-10-21 |
| 6602770 | Silicon layer to improve plug filling by CVD | Sandeep Desai, Steve Ghanayem | 2003-08-05 |
| 6541401 | Wafer pretreatment to decrease rate of silicon dioxide deposition on silicon nitride compared to silicon substrate | Manuel A. Hernandez | 2003-04-01 |