Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638810 | Tantalum nitride CVD deposition by tantalum oxide densification | Mouloud Bakli, Huyen Tran | 2003-10-28 |
| 6602770 | Silicon layer to improve plug filling by CVD | Sandeep Desai, Scott Brad Herner | 2003-08-05 |