Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638810 | Tantalum nitride CVD deposition by tantalum oxide densification | Steve Ghanayem, Huyen Tran | 2003-10-28 |
| 6524954 | Reduction of tungsten silicide resistivity by boron ion implantation | Hervé Monchoix, Denis Thierry Sauvage | 2003-02-25 |