Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638862 | Radical-assisted sequential CVD | — | 2003-10-28 |
| 6638859 | Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition | Thomas E. Seidel, Carl Galewski | 2003-10-28 |
| 6630401 | Radical-assisted sequential CVD | — | 2003-10-07 |
| 6617173 | Integration of ferromagnetic films with ultrathin insulating film using atomic layer deposition | — | 2003-09-09 |
| 6602784 | Radical-assisted sequential CVD | — | 2003-08-05 |
| 6551399 | Fully integrated process for MIM capacitors using atomic layer deposition | Thomas E. Seidel | 2003-04-22 |
| 6540838 | Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition | Carl Galewski | 2003-04-01 |
| 6503330 | Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition | Thomas E. Seidel, Carl Galewski | 2003-01-07 |