Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638859 | Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition | Ofer Sneh, Carl Galewski | 2003-10-28 |
| 6635570 | PECVD and CVD processes for WNx deposition | Carl Galewski, Claude A. Sands, Hector Velasco, Lawrence D. Matthysse | 2003-10-21 |
| 6551399 | Fully integrated process for MIM capacitors using atomic layer deposition | Ofer Sneh | 2003-04-22 |
| 6502605 | Process for the production of a face-to-face carpet fabric | Rainer Goessl | 2003-01-07 |
| 6503330 | Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition | Ofer Sneh, Carl Galewski | 2003-01-07 |