Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635495 | Infrared detecting element, infrared two-dimensional image sensor, and method of manufacturing the same | Kazuhiko Hashimoto, Tomonori Mukaigawa, Ryuichi Kubo, Hiroyuki Kishihara, Minoru Noda | 2003-10-21 |
| 6580091 | APPARATUS AND METHOD FOR OPTICAL EVALUATION, APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE | Koji Eriguchi, Takayuki Yamada | 2003-06-17 |
| 6576566 | Apparatus and method for forming thin film at low temperature and high deposition rate | Kazuhiko Hashimoto, Tomonori Mukaigawa, Ryuichi Kubo, Hiroyuki Kishihara, Tatsuro Usuki +1 more | 2003-06-10 |