Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583640 | Method and apparatus for evaluating insulating film | Yukiko Hashimoto, Akio Watakabe | 2003-06-24 |
| 6580091 | APPARATUS AND METHOD FOR OPTICAL EVALUATION, APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE | Takayuki Yamada, Masanori Okuyama | 2003-06-17 |