Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635495 | Infrared detecting element, infrared two-dimensional image sensor, and method of manufacturing the same | Kazuhiko Hashimoto, Tomonori Mukaigawa, Ryuichi Kubo, Minoru Noda, Masanori Okuyama | 2003-10-21 |
| 6576566 | Apparatus and method for forming thin film at low temperature and high deposition rate | Kazuhiko Hashimoto, Tomonori Mukaigawa, Ryuichi Kubo, Tatsuro Usuki, Minoru Noda +1 more | 2003-06-10 |