Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573517 | Ion implantation apparatus | Michiro Sugitani, Mitsukuni Tsukihara, Mitsuaki Kabasawa, Kouji Inada | 2003-06-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573517 | Ion implantation apparatus | Michiro Sugitani, Mitsukuni Tsukihara, Mitsuaki Kabasawa, Kouji Inada | 2003-06-03 |