Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635889 | Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereof | Mitsuaki Kabasawa, Yuji Takahashi, Michiro Sugitani | 2003-10-21 |
| 6573517 | Ion implantation apparatus | Michiro Sugitani, Yoshitomo Hidaka, Mitsuaki Kabasawa, Kouji Inada | 2003-06-03 |